For citations:

Chepkasov S.Yu., Zolkin A.S., Piliptsov D.G., Gladkikh E.V., Kravchuk K.S. STUDY OF STRUCTURE AND MECHANICAL PROPERTIES OF TETRAHEDRAL AMORPHOUS CARBON FILMS DEPOSITED AT VARIOUS DISTANCES BETWEEN THE SOURCE AND THE SUBSTRATE. SIBERIAN JOURNAL OF PHYSICS. 2018;13(3):55-60. (In Russ.) https://doi.org/10.25205/2541-9447-2018-13-3-55-60