For citations:

Zolkin A.S., Semerikova A.I., Chepkasov S.Yu., Khomyakov M.N. Influence of the Carbon Ion Implantation on the Adhesion and Properties of Amorphous Carbon Films on Germanium. SIBERIAN JOURNAL OF PHYSICS. 2018;13(4):67-73. (In Russ.) https://doi.org/10.25205/2541-9447-2018-13-4-67-73