The Modification of Optical Properties of the Surfaces by the Glancing Angle Deposition Technique
https://doi.org/10.25205/2541-9447-2021-16-1-91-100
Abstract
The paper considers the optical properties and structure of thin films of titanium dioxide formed by the glancing angle deposition method. It was show that this method allows the formation of coatings having a significantly lower refractive index than that of the initial material. Thus, the experimentally obtained value of the refractive index of thin films of titanium dioxide was ~ 1.2, which is almost two times less than that of a polycrystalline material. This allows you to use this method to produce the coatings with a variable refractive index using only one material, changing the geometry of the deposition process only.
Supporting agencies: The reported study was funded by RFBR and Novosibirsk region according to the research project 19-42-540009 r_a. The work was done at the shared research center SSTRC on the basis of the VEPP-4 – VEPP-2000 Complex at BINP SB RAS, using equipment supported by project RFMEFI62119X0022. The SEM and ellipsometry studies were performed on the equipment of CKP “VTAN” in the ATRC department of NSU
About the Authors
I. A. Azarov
Novosibirsk State University; Rzhanov Institute of Semiconductor Physics SB RAS
Russian Federation
Russian Federation
Ivan A. Azarov, Engineer, Junior Researcher, Rzhanov Institute of Semiconductor Physics SB RAS; Junior Researcher, Novosibirsk State University
Novosibirsk
K. E. Kuper
Budker Institute of Nuclear Physics SB RAS
Russian Federation
Russian Federation
Konstantin E. Kuper, PhD, Senior Scientific Researcher
Novosibirsk
A. G. Lemzyakov
Novosibirsk State University; Budker Institute of Nuclear Physics SB RAS
Russian Federation
Russian Federation
Aleksey G. Lemzyakov, Junior Researcher, Novosibirsk State University; Engineer, Junior Researcher, Budker Institute of Nuclear Physics SB RAS
Novosibirsk
V. V. Porosev
Budker Institute of Nuclear Physics SB RAS
Russian Federation
Russian Federation
Vyacheslav V. Porosev, PhD, Senior Scientific Researcher
Novosibirsk
A. A. Shklyaev
Novosibirsk State University; Rzhanov Institute of Semiconductor Physics SB RAS
Russian Federation
Russian Federation
Alexander A. Shklyaev, Doctor of Science, Leading Researcher, Rzhanov Institute of Semiconductor Physics SB RAS; Leading Researcher, Novosibirsk State University
Novosibirsk
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Review
For citations:
Azarov I.A., Kuper K.E., Lemzyakov A.G., Porosev V.V., Shklyaev A.A. The Modification of Optical Properties of the Surfaces by the Glancing Angle Deposition Technique. SIBERIAN JOURNAL OF PHYSICS. 2021;16(1):91-100. (In Russ.) https://doi.org/10.25205/2541-9447-2021-16-1-91-100
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